Wafer-Level Test Equipment

Probe Station Systems for Wafer-Level Semiconductor Testing

A probe station positions electrical, RF or optical probes on wafer and die test pads, then connects the device under test to measurement instruments or an ATE platform. Browse available wafer probers and compare automation, wafer size, chuck, probe interface, temperature control and production integration before requesting a quote.

Wafer Probe Station Manual to Automatic DC / RF / Power Test New & Used Equipment
Available Equipment

Browse Current Probe Station Models

Open each product page to review the model platform. For a purchasing decision, the actual wafer handling, chuck, probe-card interface, software, temperature options, accessories and machine condition must still be confirmed.

Looking for a specific ACCRETECH, FormFactor, Cascade, MPI, TEL, Electroglas or another wafer prober? Send the model number even when it is not currently shown.

ACCRETECH AP3000 Wafer Prober

ACCRETECH AP3000 Wafer Prober

Pre-owned ACCRETECH AP3000 wafer prober for semiconductor wafer testing. Ask about machine condition, configuration, del...

Build the Complete Test Path

A Probe Station Does Not Work Alone

The station supplies precise positioning, controlled contact and a stable test environment. The complete result also depends on probes or a probe card, cables, switching, test instruments, calibration and software. This is why two visually similar probe stations can support very different measurements.

01

Wafer, Die or Substrate

Confirm diameter, thickness, pad layout, backside condition and whether the DUT is a full wafer, partial wafer or individual die.

02

Chuck & Environment

Vacuum, thermal, high-power, low-noise, light-tight, pressure or cryogenic requirements change the station configuration.

03

Probe Contact

Choose individual probe positioners or a probe card according to pad count, pitch, frequency, current and repeatability.

04

Measurement Instruments

SMUs, parameter analyzers, oscilloscopes, VNAs, power analyzers or ATE resources perform the electrical test.

05

Control & Data

Alignment, stepping, wafer mapping, test sequence, calibration and result handling determine workflow efficiency.

Sales shortcut: tell us what you are measuring and which instruments you already have. We can then narrow the probe station, interface and automation requirements without making you specify every component first.

Choose by Measurement

The Test Objective Determines the Probe Station Configuration

“Probe station” is a broad equipment category. A system for DC parametric characterization is not automatically suitable for RF, high-power, photonics or cryogenic testing.

01DC / IV-CV

Device characterization, process monitoring and low-current measurements may require guarded or triax connections, a suitable chuck and EMI/light shielding.

SMUParameter AnalyzerLow Leakage
02RF / mmWave

High-frequency probing depends on RF positioners, compatible probes, calibration substrates, stable cabling and controlled probe-to-pad alignment.

VNACalibrationRF Chuck
03High Power

Power semiconductor test changes current, voltage, isolation, thermal control, arcing protection and operator-safety requirements.

High CurrentHigh VoltageThermal Chuck
04RF / Optical / SiPh

Silicon photonics and optoelectronic test may combine electrical probes with fiber alignment, optical instruments and synchronized motion.

Optical AlignmentFiber ArrayMixed Signal
05FA & R&D

Failure analysis and engineering labs usually value flexible access, microscopes, manipulators and quick changes between wafer, die and package formats.

Manual ControlMicroscopeFlexible DUT
06Vacuum / Cryogenic

Low-temperature, vacuum or magnetic-field measurements require a dedicated chamber, feedthroughs, thermal design and compatible probe positioning.

VacuumLow TemperatureSpecialty System
Automation Level

Manual, Semi-Automatic or Automatic Probe Station?

The best level of automation depends on test volume, wafer size, alignment difficulty, recipe repeatability and how much operator involvement the process can accept.

Decision PointManual Probe StationSemi-Automatic Probe StationAutomatic Wafer Prober
Typical UseR&D, failure analysis, education and low-volume characterization.Engineering, parametric test and repeatable medium-volume wafer measurements.Production wafer test, mapped stepping, automated alignment and higher-throughput screening.
Operator RoleOperator positions the wafer, probes and measurement points directly.Motorized stage and software automate selected movements while the operator manages setup.Loader, alignment, wafer map and test sequence can run with limited intervention.
FlexibilityHighest for changing experiments. Easy access to probe arms and DUT.Balances flexibility with repeatable motion and recipe control.Best when product format, probe card and test flow are well defined.
ThroughputLowest; strongly influenced by operator skill and setup time.Improved stepping and alignment without the full cost of production automation.Highest potential, but actual throughput also depends on tester time, contact quality and wafer handling.
Best Buying QuestionCan the platform support my measurement instruments and probe geometry?Which movements, alignment and mapping functions are automated?What loader, wafer size, probe-card interface, temperature range and factory interface are included?

Current inventory may focus on production probers. We can still review requirements for manual, semi-automatic, RF, power or specialty probe stations through the sourcing network.

Ask Which Type Fits
Probe Station Price

Why Probe Station Prices Vary So Widely

Search results often mix small manual laboratory platforms with 200 mm or 300 mm automated wafer probers. Those systems belong to very different price classes, so a useful quotation must start with the intended measurement and the actual configuration.

For used equipment, the year alone does not explain value. Loader condition, stage accuracy, chuck and temperature options, probe-card interface, software, controllers, accessories and serviceability can have a greater effect on the final purchase.

Request Current Price
Test Equipment Boundaries

Probe Station, ATE and Test Handler Are Different Parts of the Test Flow

Buyers often use these terms together, but each equipment category has a different job. Clarifying the boundary prevents a quote for a mechanical prober when the real need is a tester, probe card or packaged-device handler.

Probe Station / Wafer Prober

Positions the wafer or die and makes repeatable physical contact through probes or a probe card.

View Models

ATE / Testing System

Generates test stimulus, measures device response and executes the electrical test program.

Testing Systems

Probe Card & Probes

Create the electrical interface between the device pads and the measurement path; pitch, frequency and current must match the application.

Equipment Range

Test Handler

Feeds, temperature-conditions and sorts packaged devices after wafer-level probing and packaging.

Read Test Guides
Configuration Review

We Help Turn a Test Requirement Into an Equipment Shortlist

You do not need to prepare a complete specification before contacting us. Start with the device, measurement and wafer format. We will identify the missing configuration points and check available equipment against the real test setup.

Start a Probe Station Inquiry
You Provide 01

Device & Wafer

Product type, wafer size, pad layout, thickness and loading format.

You Provide 02

Test Objective

Characterization, failure analysis, production screening, RF, power or another measurement.

We Confirm 03

Station & Contact

Automation level, chuck, stage, probe card or positioners, microscope and enclosure.

We Confirm 04

Actual Supply Scope

Model, serial number, software, controllers, loader, accessories, condition and delivery support.

Buyer Questions

Probe Station FAQ

These answers cover the questions that most often affect equipment selection, integration and quotation.

What is the difference between a probe station and a wafer prober?

The terms overlap. “Probe station” is often used for analytical or engineering platforms, while “wafer prober” commonly describes semi-automatic or automatic systems that step across full wafers and may include loaders, wafer mapping and production interfaces. The exact model architecture matters more than the name.

Does a probe station include the tester or measurement instruments?

Not always. A probe station normally provides positioning, contact and the test environment. SMUs, parameter analyzers, VNAs, oscilloscopes or ATE resources may be separate and must be integrated through compatible probes, cables, switching and software.

How do I choose between manual and automatic probing?

Manual systems are flexible for R&D and changing experiments. Semi-automatic systems add repeatable motorized motion and mapping. Automatic wafer probers are better suited to defined production flows, cassette handling and higher test volume.

What determines probe station price?

Wafer size, automation, loader, chuck, temperature range, stage accuracy, probe interface, microscope, enclosure, software, controllers, included accessories and equipment condition all affect price. A small manual laboratory platform should not be compared directly with a production automatic prober.

Can one probe station support DC, RF and high-power testing?

Some modular platforms can be reconfigured, but the chuck, probes, cables, positioners, shielding, calibration and safety design differ. Support should be confirmed for the actual configuration rather than inferred from the base model name.

What should be checked when buying a used probe station?

Confirm the complete model and serial number, wafer size, loader, stage and alignment performance, chuck type, temperature options, probe-card interface, controllers, software and licenses, included accessories, operating condition and service history.

Send the Probe Station Model—or Describe the Measurement You Need

We will check current equipment, configuration requirements, actual supply scope and delivery options for your wafer-level test project.

Request a Probe Station Quote