Wafer dicing equipment is used to create controlled grooves or separate wafers, packages and selected substrates into individual devices. Depending on the application, the cutting mechanism may be a high-speed abrasive blade, a laser process, internal laser modification, plasma etching or another qualified singulation method. The equipment must also control alignment, workholding, cutting position, debris, cleaning and inspection.
Cutting MethodBlade, laser, stealth, plasma and scribe-based approaches create the cut in different ways.
Workpiece ControlFrames, tape, chuck tables, fixtures and handling keep the material stable throughout the process.
Position and InspectionVision, alignment, focus and kerf inspection functions help maintain the required street position.
Factory IntegrationUtilities, loading, cleaning, software and surrounding equipment affect installation and production use.
Equipment names do not guarantee process compatibility. The selected platform should be checked against the actual material, thickness, die layout, kerf target, cut depth, throughput and quality requirement.